John T. Felts,Thomas E. Fisk,Robert S. Abrams,John Ferguson,Jonathan R. Freedman,Robert J. Pangborn,Peter J. Sagona,Christopher Weikart
申请号：
US14357418
公开号：
US10189603B2
申请日:
2012.11.09
申请国别(地区):
US
年份:
2019
代理人:
摘要：
A method for providing a passivation layer or pH protective coating on a substrate surface by PECVD is provided, the method comprising generating a plasma from a gaseous reactant comprising polymerizing gases. The lubricity, passivation, pH protective, hydrophobicity, and/or barrier properties of the passivation layer or pH protective coating are set by setting the ratio of the O2 to the organosilicon precursor in the precursor feed, and/or by setting the electric power used for generating the plasma. In particular, a passivation layer or pH protective coating made by the method is provided. Pharmaceutical packages coated by the method and the use of such packages protecting a composition contained in the vessel against mechanical and/or chemical effects of the surface of the package without a passivation layer or pH protective coating material are also provided.
