John T. Felts,Thomas E. Fisk,Robert S. Abrams,John Ferguson,Jonathan R. Freedman,Robert J. Pangborn,Peter J. Sagona,Christopher Weikart
申请号：
US16806589
公开号：
US20200270025A1
申请日:
2020.03.02
申请国别(地区):
US
年份:
2020
代理人:
摘要：
A method for providing a passivation layer or pH protective coating on a substrate surface by PECVD is provided, the method comprising generating a plasma from a gaseous reactant comprising polymerizing gases. The lubricity, passivation, pH protective, hydrophobicity, and/or barrier properties of the passivation layer or pH protective coating are set by setting the ratio of the O2 to the organosilicon precursor in the precursor feed, and/or by setting the electric power used for generating the plasma. In particular, a passivation layer or pH protective coating made by the method is provided. Pharmaceutical packages coated by the method and the use of such packages protecting composition contained in the vessel against mechanical and/or chemical effects of the surface of the package without a passivation layer or pH protective coating material are also provided.
