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ELECTRODE ARRANGEMENT FOR FORMING A DIELECTRIC BARRIER PLASMA DISCHARGE
专利权人:
CINOGY GMBH
发明人:
Dirk WANDKE,Leonhard TRUTWIG,Mirko HAHNL,Karl-Otto STORCK
申请号:
US16329455
公开号:
US20190223280A1
申请日:
2017.07.21
申请国别(地区):
US
年份:
2019
代理人:
摘要:
The invention relates to an electrode arrangement for forming a dielectric barrier plasma discharge between an electrode (1) supplied with an AC high voltage by a control device (20) and a treatment surface (21) of an electrically conductive body (22), said arrangement functioning as a ground electrode, wherein a dielectric material (8) completely covets the electrode (1) up to the treatment surface (21) and forms a contact side for the surface (21). The electrode arrangement permits effective and homogeneous formation of the plasma (23), in particular for large treatment surfaces (21), because the electrode (1) consists of at least two electrode portions (2, 3) arranged next to one another at the same distance (6) from the contact side and insulated from one another by the dielectric material (8), and because adjacent electrode portions are supplied by the control device with compensating partial AC voltages which are mirror-inverted in terms of the waveform and the voltage level.
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