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Bottle change apparatus, substrate treatment apparatus, bottle change method, bottle cap, bottle cap change apparatus and bottle cap change method
专利权人:
Tokyo Electron Limited
发明人:
Dauendorffer Arnaud Alain Jean,Miyazaki Shinobu
申请号:
US201414340680
公开号:
US10000331(B2)
申请日:
2014.07.25
申请国别(地区):
美国
年份:
2018
代理人:
Posz Law Group, PLC
摘要:
A bottle change apparatus includes a change mechanism that changes a bottle, and the bottle includes a bottle cap. The bottle cap includes: a treatment solution straw part that forms a treatment solution flow passage for supplying a treatment solution in the bottle to an outside of the bottle and extends to an inside of the bottle; and a treatment solution connecting part that is provided at an end portion outside the bottle of the treatment solution straw part. The change mechanism includes: a connection mechanism part including a treatment solution pipe which is connected to the treatment solution connecting part of the bottle and through which the treatment solution supplied from the bottle flows; and a bottle mounting part that transfers the bottle to a connection position where the treatment solution connecting part and the treatment solution pipe are connected together.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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