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表面弾性波センサ
专利权人:
日本無線株式会社
发明人:
吉村 直之,谷津田 博美,小貝 崇
申请号:
JP20140222597
公开号:
JP6001034(B2)
申请日:
2014.10.31
申请国别(地区):
日本
年份:
2016
代理人:
摘要:
PROBLEM TO BE SOLVED: To significantly reduce or avoid the error due to electrical coupling between a measured medium and an electrode, in a surface acoustic wave sensor where measurement and monitoring of the conductivity, relative permittivity, viscosity, and the like, of a desired medium are achieved based on the propagation characteristics of surface acoustic wave on a piezoelectric substrate.SOLUTION: A surface acoustic wave sensor has a plurality of sealing members formed on a piezoelectric substrate, and individually sealing a plurality of electrodes performing energy conversion of an electric signal and a surface acoustic wave. The surface acoustic wave sensor detects the presence or absence or the characteristics of a medium in a reaction field, as the propagation characteristics of the surface acoustic wave in the reaction field surrounded by the plurality of electrodes on the piezoelectric substrate. A plurality of covering members are attached individually to the whole area at the top of the plura
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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