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弾性表面波センサ
专利权人:
日本無線株式会社
发明人:
小貝 崇
申请号:
JP20130194818
公开号:
JP6286768(B2)
申请日:
2013.09.20
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a surface acoustic wave sensor capable of improving measurement accuracy and simply performing measurement and small in occupancy rate of a detection area.SOLUTION: The surface acoustic wave sensor includes a first surface acoustic element and a second surface acoustic element in order to perform differential detection when a variation of a target in an object to be measured is smaller than a variation by disturbance. The propagation distance of the second surface acoustic element is set corresponding to a ratio of the variation of the disturbance to the variation of the object to be measured to the propagation distance of the first surface acoustic element; the variation of the object to be measured in the second surface acoustic element is set to be smaller than the detection limit of the surface acoustic wave sensor; or the ratio of the variation of the disturbance to the variation of the object to be measured and the variation of the object to be measured in the second sur
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