PROBLEM TO BE SOLVED: To provide an electron microscope device in which analysis of spacial configuration is made possible by applying a CT method (computerized tomography method) without segmentizing the test piece and application of the CT method is possible in a general case. SOLUTION: By a two-dimensional relative treatment with a reference picture based on a series of transmission images obtained by inclining the test piece for each certain angle, an identical field of view is selected and cut out, thereby the position shifting is corrected. COPYRIGHT: (C)2005,JPO&NCIPI
