SUGITA, Noriaki,MATSUDA, Shuhei,MATSUSHITA, Takayuki,CHINEN, Mika
申请号:
EP20160857566
公开号:
EP3366747(A4)
申请日:
2016.10.21
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要:
A polishing composition capable of suppressing surface defects and reducing haze is provided. The polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; a polyalcohol; and an alkali compound. Preferably, the polishing composition further includes a non-ionic surfactant.