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POLISHING COMPOSITION
专利权人:
Nitta Haas Incorporated
发明人:
SUGITA, Noriaki,CHINEN, Mika,MATSUSHITA, Takayuki,MATSUDA, Shuhei
申请号:
EP20160857515
公开号:
EP3366746(A4)
申请日:
2016.10.20
申请国别(地区):
欧洲专利局
年份:
2018
代理人:
摘要:
A polishing composition that can suppress surface defects and reduce haze is provided. A polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; and an alkali compound, where an average particle size of particles in the polishing composition measured by dynamic light scattering is not more than 55 nm. Preferably, the polishing composition further includes a non-ionic surfactant. Preferably, the polishing composition further includes a polyalcohol.
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中国工程科技知识中心
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http://www.ckcest.cn/home/

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