The active gas emission apparatus 100 of the present invention includes a plasma generation unit 12, a nozzle 1 for discharging an active gas activated by plasma generated in the plasma generation unit 12, and a light source unit 50 that emits light toward an arbitrary position ahead of the tip of the nozzle 1. The active gas emission apparatus 100 preferably further includes a control unit for synchronizing generation of plasma in the plasma generation unit and light emission in the light source unit.本發明之活性氣體照射裝置100具備：電漿產生部12；噴嘴1，其噴出藉由電漿產生部12產生之電漿而活化的活性氣體；及光源部50，其朝噴嘴1之前端之前方之任意位置發出光。該活性氣體照射裝置100較佳為進而具備控制部，該控制部使電漿產生部之電漿產生與上述光源部之發光同步。
