The present invention provides a reactive gas application apparatus capable of easily and surely applying a reactive gas to a target object. The reactive gas application apparatus (100) includes: a plasma generating unit (12), a nozzle (1) for discharging a reactive gas activated by plasma generated in the plasma generation unit (12), and a light source unit (50) for emitting light toward a position ahead of a tip of the nozzle (1). The reactive gas application apparatus preferably further includes a control unit for synchronizing plasma generation in the plasma generation unit and light emission in the light source unit.
