Systems and methods for obtaining information about a plasma load

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专利权人:

Advanced Energy Industries, Inc.

发明人:

Van Zyl Gideon

申请号：

US201514885455

公开号：

US9578731(B2)

申请日:

2015.10.16

申请国别(地区):

美国

年份:

2017

代理人:

Neugeboren O'Dowd PC

摘要：

A power generation system and method for identifying characteristics of a plasma load are disclosed. The power generation system may include a power source configured to apply a primary power signal at a primary frequency to an output and one or more secondary power signals at one or more secondary frequencies to the output. A sensor is arranged to monitor a characteristic of the power delivered to the plasma load, and an identification module analyzes the monitored characteristic to extract characteristics of the plasma load.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/