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Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel
专利权人:
发明人:
Kei Masunishi,Hideaki Fukuzawa,Yoshihiko Fuji,Akiko Yuzawa,Kazuaki Okamoto
申请号:
US14721523
公开号:
US09952112B2
申请日:
2015.05.26
申请国别(地区):
US
年份:
2018
代理人:
摘要:
According to an embodiment, a pressure sensor includes a support part, a flexible membrane part, and a magnetoresistive element. The flexible membrane part is supported by the support part, and includes a first region and a second region with rigidity lower than rigidity of the first region. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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