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Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
专利权人:
Kabushiki Kaisha Toshiba
发明人:
Yoshihiko Fuji,Hideaki Fukuzawa,Shiori Kaji,Akio Hori,Tomohiko Nagata,Michiko Hara,Yoshihiro Higashi,Akiko Yuzawa
申请号:
US15847127
公开号:
US10413198B2
申请日:
2017.12.19
申请国别(地区):
US
年份:
2019
代理人:
摘要:
According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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