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Imprinting device and imprinting method
专利权人:
SCIVAX CORPORATION
发明人:
Kawaguchi Hirosuke,Tanaka Satoru
申请号:
US201214359647
公开号:
US9606431(B2)
申请日:
2012.11.21
申请国别(地区):
美国
年份:
2017
代理人:
Factor Intellectual Property Law Group, Ltd.
摘要:
An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.
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