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THERMAL CONDITIONING METHOD
专利权人:
ASML NETHERLANDS B.V.
发明人:
CADEE Theodorus Petrus Maria,DE SMET Benjamin Joseph,DONDERS Sjoerd Nicolaas Lambertus,VERDONCK Adrianus Marianus
申请号:
US201515528187
公开号:
US2018024446(A1)
申请日:
2015.11.24
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
A method of thermally conditioning a physical object, includes guiding a two-phase cooling medium through a cooling duct of the physical object, wherein the guiding includes: guiding the two-phase cooling medium in a liquid phase via a pre-heating duct of the physical object from a supply side of the physical object at least partly towards a discharging side of the physical object, the two-phase cooling medium being pre-heated in the pre-heating duct; guiding the two-phase cooling medium from the pre-heating duct to a phase transitioning duct of the physical object, the two-phase cooling medium at least partly transitioning from the liquid phase towards a gas phase in the phase transitioning duct; guiding the two-phase cooling medium from the phase transitioning duct to a discharging duct of the physical object; and discharging at the discharging side the two-phase cooling medium from the discharging duct.
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