Smith, Anthony John,Barthold, Jeffery C.,Dax, William John
申请号:
EP20120185709
公开号:
EP2573408(B1)
申请日:
2012.09.24
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
A solenoid valve assembly (10) capable of providing a continuous flow of pressurized inert gas to operate a process tool without interruption. A system comprising the solenoid valve assembly is also provided.