ION EXCHANGE RESINS PURIFICATION METHODS AND METHODS OF MAKING IONIC RESINS

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专利权人:

ROHM AND HAAS ELECTRONIC MATERIALS LLC

发明人:

ANDREY RUDENKO,GERHARD POHLERS

申请号：

KR20180125348

公开号：

KR20190049465(A)

申请日:

2018.10.19

申请国别(地区):

韩国

年份:

2019

代理人:

摘要：

The present invention relates to an ion exchange resin comprising a crosslinked resin and a salt covalently bonded to a carbon of the resin. The salt comprises a first non-metallic cation and a first counteranion, wherein the first counteranion comprises a second non-metallic cation and a thiosulfate counteranion, and wherein the ion exchange resin is essentially free of metals. The ion exchange resin is especially useful for removing impurities from solutions that are useful for manufacturing semiconductor devices.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/