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MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
专利权人:
Applied Materials, Inc.
发明人:
Moyne James Robert,Iskandar Jimmy
申请号:
US201715444647
公开号:
US2017168477(A1)
申请日:
2017.02.28
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.
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