BORON-CONTAINING COMPOUNDS, COMPOSITIONS, AND METHODS FOR THE DEPOSITION OF BORON CONTAINING FILMS

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专利权人:

AIR PRODUCTS AND CHEMICALS, INC.

发明人:

LEI, Xinjian,KIM, Moo-Sung

申请号：

WO2016US24703

公开号：

WO2016160800(A1)

申请日:

2016.03.29

申请国别(地区):

世界知识产权组织国际局

年份:

2016

代理人:

摘要：

Described herein are boron-containing precursor compounds, and compositions and methods comprising same, for forming boron-containing films. In one aspect, the film is deposited from at least one precursor having the following Formula I or II described herein.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/