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Method and device for observing a specimen in a field of view of an electron microscope
专利权人:
发明人:
申请号:
US20040938637
公开号:
US7012254(B2)
申请日:
2004.09.13
申请国别(地区):
美国
年份:
2006
代理人:
摘要:
The present invention provides a method and device for observing a specimen in a field of view of an electron microscope. The method may include the steps of obtaining an image formed by irradiating an electron beam to a specimen; presetting an arbitrary search target pattern similar to a search target form; determining whether the field of view has a brightness inappropriate for observation or search; adjusting electro-optical conditions of an electron microscope when it is determined that a field of view is appropriate for observation or search; searching the field of view for a form having the same pattern as the search target pattern; and measuring a number of the forms obtained by the search.
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