PROBLEM TO BE SOLVED: To form a trajectory of scattering electrons which excellently reflects a diffraction pattern from a sample in field emission type low-energy electron diffraction equipment. SOLUTION: This equipment is provided with a first electrode 15 which is installed in a vacuum chamber 11 and which corresponds to a lead-in electrode as shown in the figure, and has an inverted cone-type inner wall which becomes gradually smaller downward as shown in the figure, a probe needle shield electrode 17 arranged in a space formed at the inner side of the inner wall of the first electrode 15, and an arm 21 to support the probe needle shield electrode 17. Furthermore, it is provided with a base board 23 to support the arm 21, a probe needle 25 which is held by the probe needle shield electrode 17 and protrudes downward, a sample holder 27 in which a sample 26 can be arranged in the vicinity of the probe needle 25, and a moving mechanism 30 in which the sample holder 27 can be moved. COPYRIGHT: (C)2005,JPO&NCIPI
