Low energy electron sterilizers and method of sterilization using low energy electrons are disclosed herein. An example method of sterilizing an instrument using low energy electrons can include generating one or more low energy electrons, maintaining the instrument in a vacuum and irradiating the instrument with the low energy electrons. The low energy electrons can have an energy less than or equal to 25 keV, and the vacuum can be sufficiently low to prevent the one or more electrons from producing a plasma.
