A method for analyzing the exhaust gas of internal combustion engines provides for the cooling of the exhaust gas before analysis, the determination of the concentration of at least two different exhaust gas components in at least two separate analysis stages or the determination of the concentration of a single exhaust gas component with at least two different cooling stages. In order to achieve a higher measuring accuracy, at least one first cooling is carried out before a first analysis stage and at least one second cooling is carried out at a lower temperature than that of the first cooling before at least one further analysis stage.