PROBLEM TO BE SOLVED: To provide an Auger electron spectroscope which is sufficiently installed at a pipe having an internal diameter of 35 mm and disposed at a Conflat flange having an outer diameter of 70 mm, and especially, which is made compact in its outside diameter, and also to provide Auger electron spectroscopy which uses the spectroscope. SOLUTION: An electron beam is projected from an electron gun 11 onto a sample S to be analyzed, in order to cause Auger electrons to be emitted from the sample S. Then, only Auger electrons AE, having emission polar angles in a range of 26±2 degrees and being selected from the Auger electrons, are introduced into a space between an inner cylindrical electrode 13 and an outside cylindrical electrode 14 arranged so as to surround the electron gun 11 and deflected by a deflection electric field, whereby an analysis is carried out. COPYRIGHT: (C)2006,JPO&NCIPI
