PROBLEM TO BE SOLVED: To provide a surface inspection device for realizing the shortening of the time required in inspection without increasing the number of robots, and to provide a surface inspection method. SOLUTION: The surface inspection device 1 is equipped with a robot arm 23 equipped with an illumination means 21 and a CCD camera 22 both of which are employed with respect to a surface to be inspected and an inspection result output part 3 for detecting the flaw on the surface to be inspected on the basis of the imaging signal of the CCD camera 22 to output the same and has an operation processing part for causing the robot arm 23 to move the illumination means 21 and the CCD camera 22 along a predetermined inspection route to allow them to perform imaging at a plurality of predetermined imaging points and a data base 4 that stores the coordinates data of a plurality of the predetermined imaging points and imaging order. The inspection result output part 3 relates one imaging signal with one coordinates data on the basis of the imaging order to specify the position, where the imaging signal is obtained, on the surface to be inspected. COPYRIGHT: (C)2009,JPO&INPIT
