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Magnetic device, vapor deposition device and vapor deposition method
专利权人:
BOE TECHNOLOGY GROUP CO., LTD.
发明人:
Zhao Dejiang,Gao Haoran,Yu Jianwei,Yin Jie
申请号:
US201414435119
公开号:
US9650709(B2)
申请日:
2014.08.28
申请国别(地区):
美国
年份:
2017
代理人:
Harness, Dickey & Pierce, P.L.C.
摘要:
The present disclosure provides a magnetic device and a vapor deposition device. The magnetic device is configured to adsorb a metal mask in the vapor deposition device, including: a metal plate; an electromagnet array including a plurality of electromagnets; each of the electromagnets being inserted in the metal plate; a power supply module configured to supply a current; a control module configured to, when adsorbing the metal mask during a vapor deposition process, control the power supply module to supply a direct current to all or some of the plurality of electromagnets and control a direction and a size of the direct current by sending a first control signal to the power supply module.
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