MICROMACHINED ULTRASONIC TRANSDUCERS WITH A SLOTTED MEMBRANE STRUCTURE

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专利权人:

Chirp Microsystems

发明人:

Guedes Andre,Horsley David,Kiang Meng-Hsiung,Przybyla Richard,Shelton Stefon

申请号：

US201615141746

公开号：

US2017021391(A1)

申请日:

2016.04.28

申请国别(地区):

美国

年份:

2017

代理人:

摘要：

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. A portion of the membrane that overlies the opening is divided into a plurality of cantilevers that are mechanically coupled so that the cantilevers resonate at a common frequency.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/