Flowing-Fluid X-ray Induced Ionic Electrostatic Dissipation

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专利权人:

Moxtek, Inc.

发明人:

Miller Eric,Wilson Steven West

申请号：

US201715407751

公开号：

US2017127504(A1)

申请日:

2017.01.17

申请国别(地区):

美国

年份:

2017

代理人:

摘要：

An electrostatic dissipation device 10 can comprise an elongated enclosure 11 with a longitudinal axis 12. An x-ray source 13 can be oriented to emit x-rays 16 inside of and along the longitudinal axis 12. A fluid-flow device 14 can be oriented to cause fluid to flow across the x-ray source 13 then inside of and along the longitudinal axis 12, the fluid being ionized by the x-rays 16, forming ionized fluid, then out of the elongated enclosure through outlet opening(s) 15. The arrangement of the x-ray source 13 and the fluid-flow device 14 can allow (1) fluid from the fluid-flow device 14 to cool the x-ray source 13, and (2) ion generation along the length of the elongated enclosure 11.

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