MEMS/NEMS device comprising a network of electrostatically actuated resonators and having an adjustable frequency response, notably for a band-pass filter
Commissariat A L'Energie Atomique et aux Energies Alternatives
发明人:
Arcamone Julien,Arndt Gregory
申请号：
US201414533909
公开号：
US9685929(B2)
申请日:
2014.11.05
申请国别(地区):
美国
年份:
2017
代理人:
Baker Hostetler LLP
摘要：
A MEMS/NEMS device having an adjustable frequency response comprises an array of electrostatically actuated resonators, an electrostatic actuation circuit, electrical detection means, and means adjusting the frequency response of the resonators. The device comprises resonators having a movable portion, electrically connected in series between a first biasing potential VB and a second biasing potential VB2, each resonator biased to a potential Vi between VB and VB2, depending on position in the series. The electrostatic actuation circuit comprises, for each resonator, an actuation electrode facing the movable portion, all electrodes being connected in parallel to a common control potential VIN, the actuation voltage of each resonator being equal to VIN−Vi. The detection means comprises a detection output common to all resonators, the output being connected to an output potential Vout. The means for adjusting the frequency response varies the common control potential and/or at least one of the biasing potenti
