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表面処理装置及び表面処理方法
专利权人:
学校法人慶應義塾;高周波熱錬株式会社
发明人:
佐々木 拓磨,福岡 隆弘,小茂鳥 潤,深沢 剣吾,三阪 佳孝,川嵜 一博
申请号:
JP20160064579
公开号:
JP6118931(B2)
申请日:
2016.03.28
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To improve the corrosion resistance of a steel material by forming a metal diffusion layer containing nickel and iron on a surface of the steel material in shot peening using NiO particles.SOLUTION: A surface treatment apparatus for forming a metal diffusion layer containing nickel and iron on a surface of a steel material comprises a chamber 110 replaced with an inert gas, a support part 120 arranged in the chamber 110 to support a substrate W, an induction heating coil 130 arranged around the support part 120 to heat the substrate W, a high frequency applying part 200 supplying a high frequency current to the induction heating coil 130 to induction heat the substrate W, and a projection material injection part 141 injecting a projection material P, in which NiO particles and SKH59 material particles harder than the steel material are mixed, to the support part 120.SELECTED DRAWING: Figure 1
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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