A sterile-substance-supplying apparatus comprising: an atomization unit including a reservoir unit to reserve hydrogen peroxide, and an ultrasound vibrator to impart ultrasound vibration to the reserved hydrogen peroxide to be atomized an evaporation unit, provided above the reservoir unit, that heats the atomized hydrogen peroxide to be evaporated a connecting member connecting the evaporation unit and the atomization unit to each other a hydrogen-peroxide-supply port to allow the hydrogen peroxide to be supplied to the reservoir unit a carrier-gas-supply port, provided at the connecting member, that allows carrier gas for allowing the atomized hydrogen peroxide to flow to the evaporation unit to be supplied and a container portion to reserve a substance for transmitting the ultrasound vibration generated by the ultrasound vibrator, and a metal vibrating plate, provided at a bottom portion of the reservoir unit, that transmits to the hydrogen peroxide the ultrasound vibration transmitted through the substance.
