A microplasma source and a sterilization system including the same are disclosed. The microplasma source includes: a microplasma generating unit including: a gas transmission chamber having a first inlet and a first outlet wherein the first inlet is used to import a first gas a protection and heat dissipation chamber of which an side connected to the inner wall of the first outlet a dielectric inner tube having a second inlet and a second outlet and penetrating through the protection and heat dissipation chamber, wherein the second inlet is communicated to the gas transmission chamber an electrode arranged an outside of the second outlet and located in the protection and heat dissipation chamber and a hollow metal tube disposed in the gas transmission chamber and the dielectric inner tube and having a third inlet and a third outlet, wherein the third inlet is used to import a second gas.本發明係有關於一種微電漿產生裝置及其滅菌系統,微電漿產生裝置包含一微電漿產生單元,其包括:氣體傳輸腔體,具有第一入口端及第一出口端,第一入口端輸入第一氣體;散熱保護腔體,一側連接第一出口端內壁;介電質內管,具有第二入口端及第二出口端且貫穿散熱保護腔體,第二入口端連通氣體傳輸腔體;電極,設置於第二出口端的外側且位於散熱保護腔體內;以及中空金屬管,設置於氣體傳輸腔體及介電質內管內,中空金屬管具有第三入口端及第三出口端,第三入口端輸入第二氣體。10...微電漿產生裝置20...第一氣體貯存單元30...第二氣體貯存單元40...微電漿產生單元41...氣體傳輸腔體50...電源供應單元411...第一入口端413...第一出口端43...散熱保護腔體45...電極47...介電質內管471...第二入口端473...第二出口端48...定位套頭49...中空金屬管491...第三入口端493...第三出口端60...樣本槽
