Jiunn-Der Liao,Chih-Chiang Weng,Hsin-Hung Chen,Tung-Yi Lin
申请号：
US13137709
公开号：
US09101043B2
申请日:
2011.09.07
申请国别(地区):
US
年份:
2015
代理人:
摘要：
A microplasma source and a sterilization system including the same are disclosed. The microplasma source includes: a microplasma-generating unit including: a gas transmission chamber having a first inlet and a first outlet wherein the first inlet is used to import a first gas a protection and heat dissipation chamber of which a side is connected to the inner wall of the first outlet a dielectric inner tube having a second inlet and a second outlet and penetrating through the protection and heat dissipation chamber, wherein the second inlet is communicated to the gas transmission chamber an electrode arranged outside at the second outlet and located in the protection and heat dissipation chamber and a hollow metal tube disposed in the gas transmission chamber and the dielectric inner tube and having a third inlet and a third outlet, wherein the third inlet is used to import a second gas.
