Xiong, Wei,Copland, James,Farrer, Stephen W.,Raymond, Thomas D.
申请号：
AU2009204137
公开号：
AU2009204137B2
申请日:
2009.01.08
申请国别(地区):
AU
年份:
2013
代理人:
摘要：
A system for determining a surface shape of a test object includes a pattern havinga plurality of first elements dispose about a central axis and defining an aperturecontaining the central axis. The first elements includes a plurality of commonelements having a common form and a reference element having a reference formthat is different than the common form. The system further comprises a detectorarray and an optical system. The optical system is adapted to provide an imageof the first elements when light reflects off a surface of a test object, passesthrough the aperture, and is received by the detector array. The reference formmay be configured to facilitate an association between the common elements andthe spot images of the common elements.
