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Method of measuring scanning characteristics of optical scanning apparatus and chart for measuring scanning characteristics used in same
专利权人:
发明人:
Masashi Yamada,Atsuyoshi Shimamoto,Soichiro Koshika
申请号:
US15789390
公开号:
US10126121B2
申请日:
2017.10.20
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A method of measuring scanning characteristics of an optical scanning apparatus allows measurement of scanning characteristics of an actuator. The method includes bringing a tip of the optical scanning apparatus and a chart for measuring scanning characteristics closer together and irradiating illumination light with the actuator in a non-driven state, separating the tip and the chart for measuring scanning characteristics by a predetermined distance while maintaining the relative orientations thereof, and adjusting a drive signal of the actuator so that a scanning area of the illumination light on the chart for measuring scanning characteristics can form a desired shape. At least one of an angle of deviation and a viewing angle is measured using an irradiation position of the illumination light on the chart for measuring scanning characteristics.
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