PURPOSE:To prevent the impact between a probe and a sample, by providing a moving mechanism with three axes, X, Y and Z, in a sample holder to arrange an STM (scanning tunnel microscope) scanning mechanism and a stylus. CONSTITUTION:A holder 1 is inserted into a side entry goniometer and with the movement of the holder 1, a sample is moved to observe the surface of the sample by a reflection image observation method with a searching of a field of view. In a reflection image thus obtained, an area desired to be observed with an STM is further set to perform an axial movement with a dial 18, an access to the sample 12 with a screw 21 and a shift of a stylus 5 along the surface of the sample 2 with a screw not illustrated perpendicular to the surface of paper the same as the screw 21. When the stylus 5 approaches the sample 2 with the screw 21, it does so at a distance enough to allow detection of a tunnel current observing a gap between the sample 2 and the stylus 5 with a transmission electron microscope. This can prevent impact between the stylus 5 and the sample 2 otherwise damaging the sample 2.
