YAMAGATA PUBLIC CORP FOR THE DEVELOPMENT OF INDUSTRY;JAPAN SCIENCE & TECHNOLOGY CORP
发明人:
YOKOYAMA HIDEKATSU
申请号：
JP19990293143
公开号：
JP2001116709(A)
申请日:
1999.10.15
申请国别(地区):
日本
年份:
2001
代理人:
摘要：
PROBLEM TO BE SOLVED: To provide a method and apparatus capable of observing the distribution of the recombination centers contained in a semiconductor. SOLUTION: The distribution of the recombination centers in a semiconductor is observed by measuring the electrical detection magnetic resonance of the semiconductor while controlling a magnetic field spatially and analyzing the signal obtained by this measurement. An apparatus for observing the distribution of the recombination centers in a semiconductor is equipped with a detection means of an electrical detection magnetic resonance signal and a spatial magnetic field control means.
