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Ultrasonic transducer and ultrasonic diagnostic device using same
专利权人:
Shuntaro Machida
发明人:
Shuntaro Machida,Taiichi Takezaki,Toshiyuki Mine
申请号:
US13577816
公开号:
US08617078B2
申请日:
2011.01.25
申请国别(地区):
US
年份:
2013
代理人:
摘要:
In an ultrasonic transducer comprising a first electrode, a first insulating film disposed on the first electrode, a hollow part provided above the first insulating film and disposed between surfaces above and below the hollow part, a second insulating film disposed above the hollow part, and a second electrode disposed on the second insulating film, a first conductive film disposed on a side of the surface below the hollow part and a second conductive film disposed on a side of the surface above the hollow part are provided, the first conductive film and the second conductive film are disposed so that they overlap with a region in which the surfaces above and below the hollow part contact with each other as seen from above when the transducer is driven, and they do not overlap with each other in the region as seen from above.
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