PROBLEM TO BE SOLVED: To provide a noncontact type of defect inspection method instead of a short probe type in order to solve the problem that a product used for measurement damaging an ITO film with a probe becomes loss in the conventional microprobe type in the defect inspection for the ITO film used for a color filter. SOLUTION: An electrode is installed at the lower part of an EO sensor consisting of 4 layers, such as a glass, a transparent electrode film, a BSO, and a dielectric reflection film. Voltage is applied between the transparent electrode of the EO sensor and the electrode placed at the lower part of the EO sensor by using a light source, a polarizer, and a camera. The electrode at the lower side is contacted to an ITO film surface of an object to be inspected and an electric field generated between the electrodes is visualized with the EO sensor and picked up with the camera. Thereby the defect of the ITO film is inspected. COPYRIGHT: (C)2003,JPO
