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Dense composite material, method for manufacturing the same, joined body, and member for semiconductor manufacturing apparatuses
专利权人:
NGK Insulators; Ltd.
发明人:
Asumi Jindo,Katsuhiro Inoue,Yuji Katsuda
申请号:
US14220289
公开号:
US09184070B2
申请日:
2014.03.20
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A dense composite material according to the present invention contains, in descending order of content, silicon carbide, titanium silicon carbide, and titanium carbide as three major constituents. The dense composite material contains 51% to 68% by mass of silicon carbide and no titanium silicide and has an open porosity of 1% or less. This dense composite material has properties such as an average linear thermal expansion coefficient of 5.4 to 6.0 ppm/K at 40° C. to 570° C., a thermal conductivity of 100 W/m·K or more, and a four-point bending strength of 300 MPa or more.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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