PROBLEM TO BE SOLVED: To provide an optical image measurement device with which it is possible to acquire images at a plurality of depth positions in a short measurement time without using a wide band light source.SOLUTION: An optical image measurement device according to the present invention causes the defocus amount of a reference light to change in a plurality of steps while a position at which a measurement object is irradiated with a signal light moves a distance that corresponds to one pixel of a measurement image.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2018,JPO&INPIT【課題】広帯域光源を用いることなく、短い測定時間で複数の深さ位置における画像を取得することができる光画像計測装置を提供する。【解決手段】本発明に係る光画像計測装置は、信号光が測定対象を照射する位置が計測画像の1画素に対応する距離を移動する間に、参照光のデフォーカス量を複数段階に変化させる。【選択図】図1
