PROBLEM TO BE SOLVED: To provide an imaging apparatus for imaging an observed subject while measuring a three-dimensional shape of the observed subject with high accuracy.SOLUTION: An imaging apparatus includes: an imaging unit 100 for imaging an image of an observed subject S via an object optical system 101 and a three-dimensional shape measuring unit 200 for measuring a three dimensional shape of the observed subject S by irradiating the observed subject S with measurement light for distance measurement via the object optical system 101. The three-dimensional shape measuring unit 200 has a scanning unit for scanning the measurement light made incident on the object optical system for the observed subject S, a light receiving unit for receiving the reflected light of the measurement light from the observed subject S, which is made incident via the object optical system 101, and a computing unit where control information of the scanning unit is obtained based on light-receiving output information of the light receiving unit and a distance from the object optical system 101 to the observed subject S is calculated based on the control information.COPYRIGHT: (C)2013,JPO&INPIT【課題】観察対象を撮像するとともに、観察対象の三次元形状を高精度で計測できる撮像装置を提供する。【解決手段】対物光学系101を経て観察対象Sの画像を撮像する撮像手段100と、対物光学系101を経て観察対象Sに測距用の測定光を照射して観察対象Sの三次元形状を計測する三次元形状計測手段200とを備える。三次元形状計測手段200は、対物光学系101に入射する測定光を観察対象Sに対して走査する走査手段と、対物光学系101を経て入射する観察対象Sからの測定光の反射光を受光する受光手段と、受光手段の受光出力情報に基づいて走査手段の制御情報を取得し、制御情報に基づいて対物光学系101から観察対象Sまでの距離を算出する演算手段と、を備える。【選択図】図1
