PROBLEM TO BE SOLVED: To enable an electron microscope sample to be thinned. SOLUTION: A manufacturing method for an electron microscope sample includes the steps of: mounting a sample in one end 34 of a tapered support table in which the one end 34 has thinner film thickness than another end, in such a manner that the front of the sample is visible when the other end side is watched from the one end side; irradiating the sample with convergent ion beams; and ion-trimming the upper faces by irradiating upper faces 44a and 44b which are faces of the sample in a film thickness direction of the support table, with ion beams 82 from the back of the sample. COPYRIGHT: (C)2013,JPO&INPIT
