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ELECTRON MICROSCOPE ELECTRON GUN FOR FACILITATING POSITION ADJUSTMENT AND ELECTRON MICROSCOPE INCLUDING SAME
专利权人:
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人:
CHO, Bok Lae,PARK, In Yong
申请号:
WO2016KR00076
公开号:
WO2017069343(A1)
申请日:
2016.01.06
申请国别(地区):
世界知识产权组织国际局
年份:
2017
代理人:
摘要:
The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun improving a vacuum structure so as to easily move a filament block or an electron tip of an electron gun without having bellows for maintaining a vacuum when the center axis of the filament block or the electron tip of the electron gun is mechanically misaligned with the center axis of a anode and a focusing lens. Additionally, the electron gun enables an upper flat plate to be moved on a dual O-ring sealing unit or a magnetic fluid sealing unit without having bellows, which enclose and seal an electron beam generation unit, in order to align the center axis of an electron beam with a anode plate facing a Wehnelt cylinder or with a second anode arranged side by side to a field emission electron source and a first anode, such that an electron beam is easily aligned, a simplified structure and an easy assembling and disassembling are enabled, and a reusable rubbe
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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