A processing device(400) includes: a pushing drive mechanism control unit(404A) that brings a measurement tip(306) into contact with a surface of a calibration artifact(240) at a single point in each of five directions(X, -X, Y, -Y, Z) so that the five directions including three directions(X,Y,Z) perpendicular to one another, and two directions(X,Y) among the three directions(X,Y,Z) adding a respective inversed direction(-X,-Y), are all normal directions to the surface of the calibration artifact(240); a scanning drive mechanism control unit(404B) that reciprocates the measurement tip(306) on the surface of the calibration artifact(240) on each of three planes(XY,YZ,XZ) perpendicular to one another; a coordinate acquisition unit(406) that acquires a moving amount(M) and a probe output(P) of a measuring probe (300); a matrix generation unit(408) that generates a correction matrix (AA); and a probe output correction unit(410) that corrects the probe output(P) with the correction matrix (AA). This enables an imp
