酸化亜鉛結晶層の製造方法及びミスト化学気相成長装置

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专利权人:

国立大学法人 熊本大学

发明人:

中村 有水

申请号：

JP20130033503

公开号：

JP6137668(B2)

申请日:

2013.02.22

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To provide a method of forming a zinc oxide crystal layer on a nonpolar surface of a sapphire substrate at low cost.SOLUTION: The process of manufacturing a zinc oxide crystal layer includes: transporting a mist generated by atomizing a raw material solution containing a zinc oxide precursor with a carrier gas; and growing a zinc oxide crystal on a sapphire substrate whose crystal plane at a surface is either a-plane or m-plane by a mist chemical vapor deposition method that forms a layer composed of a zinc oxide by a thermochemical reaction on the substrate.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/