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Piezoelectric device, piezoelectric module, and electronic apparatus
专利权人:
Seiko Epson Corporation
发明人:
Kanechika Kiyose
申请号:
US15350491
公开号:
US10424720B2
申请日:
2016.11.14
申请国别(地区):
US
年份:
2019
代理人:
摘要:
A piezoelectric device includes an element substrate that includes a first surface (operating surface) and a second surface (back surface) on a side opposite to the first surface, and includes a recessed opening provided on the first surface and a supporting portion surrounding the recessed opening, a piezoelectric body that is provided on the second surface of the recessed opening, a plurality of connection electrodes (lower connection electrode and upper connection electrode) that are connected to the piezoelectric body and are drawn to the second surface of the supporting portion from the piezoelectric body, a reinforcement plate that is bonded to the second surface side of the element substrate, and a plurality of through electrodes that are provided at a position of the reinforcement plate which faces the supporting portion, pass through the reinforcement plate in a thickness direction, and are respectively connected to the plurality of connection electrodes.
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