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COEFFICIENT-OF-THERMAL-EXPANSION MEASUREMENT
专利权人:
Mitutoyo Corporation
发明人:
Yokoyama, Yuichiro,Hagino, Takeshi,Kuriyama, Yutaka
申请号:
EP20170152926
公开号:
EP3190405(A1)
申请日:
2016.09.26
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
COEFFICIENT-OF-THERMAL-EXPANSION MEASUREMENT METHOD OF DIMENSION REFERENCE GAUGE, MEASURING DEVICE FOR COEFFICIENT OF THERMAL EXPANSION AND REFERENCE GAUGE A measurement target (10) comprising a plurality of measurement sections (S11, S12, S13) and a reference gauge (20) comprising a plurality of reference sections (S21, S22, S23) are placed in parallel in an inside of a temperature-controlled chamber (30). At first and second interior temperatures of the temperature-controlled chamber (30), first and second relative measurements of the lengths (D11, D12, D13) of the measurement sections (S11, S12, S13) are performed, based on the lengths (D21, D22, D23) of the corresponding reference sections. A CTE is calculated for each of the measurement sections.
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