您的位置: 首页 > 农业专利 > 详情页

SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSCOPE COMPRISING SAME
专利权人:
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人:
CHO, Bok Lae,AHN, Sang Jung,SUL, Inho
申请号:
WO2016KR08817
公开号:
WO2017034190(A1)
申请日:
2016.08.11
申请国别(地区):
世界知识产权组织国际局
年份:
2017
代理人:
摘要:
The present invention relates to a vacuum sample chamber for a particle and optical device, the vacuum sample chamber comprising: on one surface thereof, an aperture through which a particle beam to be focused along an optical axis of particles such as electrons, ions and neutral particles is incident; and on the opposite surface thereof, a detachable sample holder through which light penetrates, thereby enabling a sample to be observed and analyzed by means of the particle beam and light. The present invention implements: a sample chamber capable of reducing observation time by maintaining a vacuum therein even when a sample is put into or taken out from a sample chamber of an electron microscope or focused ion beam observation equipment, and capable of obtaining an optical image on the outside thereof without inserting a light source or an optical barrel into the sample chamber; and a light-electron fusion microscope comprising the sample chamber.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充